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We undertake designing, manufacturing and measuring. Please feel free to contact us.

Capacitance method,
flat plate, liquid, gel, ultra thin film, compound film,
dielectric constant and dielectric loss tangent
measurement system

Catalog No. dps17002040705-04

It is a system that measures the dielectric constant and dielectric loss tangent, factor of a flat plate, the liquid, and the gel.
(It is possible to correspond from -50 ℃ to 200 ℃.)
When we measure a ultra thin film, a film on the semiconductor wafer and a film, we use electrode DPT-009 for measurement and an assistant for electrodes.
It has the interface that controls the external with CPU.
* The other Windows PC and printer needs.
Iif you measure the temperature outside the temperature-controlled chamber would be required.

Specifications

Measurement frequency 1kHz、10kHz、20kHz、50kHz、100kHz、1MHz, 1MHz-100MHz Continuously variable
(The change in the measurement frequency is possible.)
Range of measurement, and accuracy Dielectric constant (εr') : 1.05-1000　accuracy ± 7%
Dielectric loss tangent (tanδ) : 0.001-0.1 accuracy ± 15%
Measurement temperature Room temperature ~ 200 degree
*It is self-control measurement

Model No.

Name Specifications Model No.
Capacitance meter
(main body)		 for 100Hz - 10kHz CME-10K-01
for 100Hz - 100kHz CME-100K-01
for 100Hz - 1MHz CME-1M-01
for 100Hz - 10MHz CME-10M-01
for 100Hz - 100MHz CME-100M-01
electrode for measurement electrode for measurement of flat plate, liquid,and gel. DPT-009
dielectric constant accurate measurement tool for liquid
(JIS - standard　　JIS　C2101)		 DPT-012
electrode for liquid measurement (pipe type)
(sample capacity,　50cc type or 200cc type)		 DPT-013
dielectric constant analysis program
It can graph the relation between the temperature and the dielectric constant. and, excel can be processed. DMP-002040705-05
USB type GPIB cable We use it for the connection of a computer and the measuring instrument. GP-01
personal computer, printer for Windows
assistant for electrode Conductive liquid to fill it between electrode and specimen　(10cc) CL-01
temperature-controlled chamber Room temperature ~ 200 degree TCOV-03

Test example

* The calculation processing is done with the computer, and the measurement result is printed out as the following graphs.
　 In addition, the numerical value is made a file, and various processing is possible in EXCEL.

Specimen shape and electrode Configurations for measurement

DPT-009 　DPT-012
80mm φ × 180mm height　　Note) with cable 　Note) with cable
Specimen 　shape Size and amount Capacitance
(at emptiness) 		88PF±5PF
Sheet 0.1 (0.01μm) -5mm　thickness
　30mmφ~55mmφ		 Liquid Volume for Test more than 50cc
Liquid, gel more than 1cc    
We can measure the films of the 0.01μm~0.1mm thickness
when we use an assistant for electrodes.		  

DPT-013 DPT-2141
Note) with cable Measurement treatment device based on JIS-C2141
Note) with cable

　with standard specimen
Model No. Amount of liquid use Size Specimen shape Size
DPT-013-050 50cc type 30mm φ × 100mm Seat board Size based on JIS-C2141,
more than φ 37mm
DPT-013-200 200cc type 34mm φ × 150mm